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Superconducting micro-resonator arrays with ideal frequency spacing

Applied physics letters, 2017-12, Vol.111 (25) [Peer Reviewed Journal]

U.S. Government ;ISSN: 0003-6951 ;EISSN: 1077-3118 ;DOI: 10.1063/1.5016190 ;CODEN: APPLAB

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  • Title:
    Superconducting micro-resonator arrays with ideal frequency spacing
  • Author: Liu, X. ; Guo, W. ; Wang, Y. ; Dai, M. ; Wei, L. F. ; Dober, B. ; McKenney, C. M. ; Hilton, G. C. ; Hubmayr, J. ; Austermann, J. E. ; Ullom, J. N. ; Gao, J. ; Vissers, M. R.
  • Subjects: Arrays ; Light emitting diodes ; Multiplexing ; Quantum computing ; Resonators ; Superconductivity ; Titanium ; Trimming
  • Is Part Of: Applied physics letters, 2017-12, Vol.111 (25)
  • Description: We present a wafer trimming technique for producing superconducting micro-resonator arrays with highly uniform frequency spacing. With the light-emitting diode mapper technique demonstrated previously, we first map the measured resonance frequencies to the physical resonators. Then, we fine-tune each resonator's frequency by lithographically trimming a small length, calculated from the deviation of the measured frequency from its design value, from the interdigitated capacitor. We demonstrate this technique on a 127-resonator array made from titanium-nitride and show that the uniformity of frequency spacing is greatly improved. The array yield in terms of frequency collisions improves from 84% to 97%, while the quality factors and noise properties are unaffected. The wafer trimming technique provides an easy-to-implement tool to improve the yield and multiplexing density of large resonator arrays, which is important for various applications in photon detection and quantum computing.
  • Publisher: Melville: American Institute of Physics
  • Language: English
  • Identifier: ISSN: 0003-6951
    EISSN: 1077-3118
    DOI: 10.1063/1.5016190
    CODEN: APPLAB
  • Source: Alma/SFX Local Collection
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