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Journal Of Vacuum Science & Technology. A, Vacuum, Surfaces, And Films
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Norwegian
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Norwegian
| Result Number | Material Type | Add to My Shelf Action | Record Details and Options |
|---|---|---|---|
| 1 |
Material Type: Article
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Consistency and reproducibility in atomic layer depositionJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2020-03, Vol.38 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/1.5140603 ;CODEN: JVTAD6Full text available |
| 2 |
Material Type: Article
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On the possible nature of deep centers in Ga2O3Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0002307 ;CODEN: JVTAD6Full text available |
| 3 |
Material Type: Article
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Thermal versus radiation-assisted defect annealing in β-Ga2O3Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0002388 ;CODEN: JVTAD6Full text available |
| 4 |
Material Type: Article
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High entropy alloy CrFeNiCoCu sputter deposited films: Structure, electrical properties, and oxidationJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2022-03, Vol.40 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0001394 ;CODEN: JVTAD6Full text available |
| 5 |
Material Type: Article
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Area-selective atomic layer deposition of molybdenum oxideJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-07, Vol.38 (4) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0000219 ;CODEN: JVTAD6Full text available |
| 6 |
Material Type: Article
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Phosphites as precursors in atomic layer deposition thin film synthesisJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2021-05, Vol.39 (3) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0000844 ;CODEN: JVTAD6Full text available |
| 7 |
Material Type: Article
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LiF by atomic layer deposition—Made easyJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-09, Vol.38 (5) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0000314 ;CODEN: JVTAD6Full text available |
| 8 |
Material Type: Article
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Design of experiments approach to luminescent CaMoO4 by atomic layer depositionJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2020-09, Vol.38 (5) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0000327 ;CODEN: JVTAD6Full text available |
| 9 |
Material Type: Article
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Control of growth orientation in as-deposited epitaxial iron-rich nickel ferrite spinelJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-03, Vol.37 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/1.5082012 ;CODEN: JVTAD6Full text available |
| 10 |
Material Type: Article
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tert-butoxides as precursors for atomic layer deposition of alkali metal containing thin filmsJournal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2020-12, Vol.38 (6) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0000589 ;CODEN: JVTAD6Full text available |
| 11 |
Material Type: Article
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Control of potassium tantalate niobate thin film crystal phase and orientation by atomic layer depositionJournal of vacuum science & technology. A, Vacuum, surfaces, and films, 2019-03, Vol.37 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/1.5063925 ;CODEN: JVTAD6Full text available |
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