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Material Type: Datasets
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Temperature Dependence of Sensitivity of Silicon Integrated Mechanical Transducer in The Temperature Range from -60°C to +200°CTechnology. Technology of Instrument Making: Scientific and Technical Collection, 1988, Vol.13 (2), p.80-100Attribution ;DOI: 10.13140/RG.2.2.35275.67362/3Digital Resources/Online E-Resources |