Consistency and reproducibility in atomic layer deposition
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2020-03, Vol.38 (2) [Peer Reviewed Journal]Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/1.5140603 ;CODEN: JVTAD6
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