skip to main content
Guest
My Research
My Account
Sign out
Sign in
This feature requires javascript
Library Search
Find Databases
Browse Search
E-Journals A-Z
E-Books A-Z
Citation Linker
Help
Language:
English
Vietnamese
This feature required javascript
This feature requires javascript
Primo Search
All Library Resources
All
Course Materials
Course Materials
Search For:
Clear Search Box
Search in:
All Library Resources
Or hit Enter to replace search target
Or select another collection:
Search in:
All Library Resources
Search in:
Print Resources
Search in:
Digital Resources
Search in:
Online E-Resources
Advanced Search
Browse Search
This feature requires javascript
Search Limited to:
Search Limited to:
Resource type
criteria input
All items
Books
Articles
Images
Audio Visual
Maps
Graduate theses
Show Results with:
criteria input
that contain my query words
with my exact phrase
starts with
Show Results with:
Search type Index
criteria input
anywhere in the record
in the title
as author/creator
in subject
Full Text
ISBN
ISSN
TOC
Keyword
Field
Show Results with:
in the title
Show Results with:
anywhere in the record
in the title
as author/creator
in subject
Full Text
ISBN
ISSN
TOC
Keyword
Field
This feature requires javascript
Pattern transfer on a vertical cavity sidewall using SU8
Journal of micromechanics and microengineering, 2009-07, Vol.19 (7), p.074018-074018 (6)
[Peer Reviewed Journal]
2009 INIST-CNRS ;ISSN: 0960-1317 ;EISSN: 1361-6439 ;DOI: 10.1088/0960-1317/19/7/074018
Full text available
Citations
Cited by
View Online
Details
Recommendations
Reviews
Times Cited
External Links
This feature requires javascript
Actions
Add to My Research
Remove from My Research
E-mail
Print
Permalink
Citation
EasyBib
EndNote
RefWorks
Delicious
Export RIS
Export BibTeX
This feature requires javascript
Title:
Pattern transfer on a vertical cavity sidewall using SU8
Author:
Verhaar, T M
;
Wei, J
;
Sarro, P M
Subjects:
Applied sciences
;
Electronics
;
Exact sciences and technology
;
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
;
Mechanical engineering. Machine design
;
Mechanical instruments, equipment and techniques
;
Microelectronic fabrication (materials and surfaces technology)
;
Micromechanical devices and systems
;
Physics
;
Precision engineering, watch making
;
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Is Part Of:
Journal of micromechanics and microengineering, 2009-07, Vol.19 (7), p.074018-074018 (6)
Description:
In this paper, a process to realize metal lines on the sidewall of high aspect ratio cavities is developed. As an alternative to conventional photoresist, SU8 is used to define patterns on vertical sidewalls of deep cavities while maintaining compatibility with conventional IC processes. When transferring a pattern onto a 3D structure, especially the coating process, cavity filling and step coverage become important issues and require specific attention. A highly uniform SU8 coating is obtained and 20 mum wide aluminium lines across 60 mum deep cavities are realized. Problems related to overexposure and to aluminium etching are presented as well. The resistance of the aluminium structures on top, bottom and sidewall of the cavities is measured and discussed.
Publisher:
Bristol: IOP Publishing
Language:
English
Identifier:
ISSN: 0960-1317
EISSN: 1361-6439
DOI: 10.1088/0960-1317/19/7/074018
Source:
Alma/SFX Local Collection
This feature requires javascript
This feature requires javascript
Back to results list
This feature requires javascript
This feature requires javascript
Searching Remote Databases, Please Wait
Searching for
in
scope:(TDTS),scope:(SFX),scope:(TDT),scope:(SEN),primo_central_multiple_fe
Show me what you have so far
This feature requires javascript
This feature requires javascript