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Estimation of Thermal Stability of Si-SiO[sub.2]-W Nanolayered Structures with Infrared Spectrometry

Materials, 2023-12, Vol.17 (1) [Peer Reviewed Journal]

COPYRIGHT 2023 MDPI AG ;ISSN: 1996-1944 ;EISSN: 1996-1944 ;DOI: 10.3390/ma17010007

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