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Thermal versus radiation-assisted defect annealing in β-Ga2O3

Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2023-03, Vol.41 (2) [Peer Reviewed Journal]

Author(s) ;info:eu-repo/semantics/openAccess ;ISSN: 0734-2101 ;EISSN: 1520-8559 ;DOI: 10.1116/6.0002388 ;CODEN: JVTAD6

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