The influence of Al 2 O 3 nanolamination in ALD ZrO 2 capacitor on physical and electrical characteristics
Journal of applied physics, 2022-12, Vol.132 (23) [Peer Reviewed Journal]Distributed under a Creative Commons Attribution 4.0 International License ;ISSN: 0021-8979 ;EISSN: 1089-7550 ;DOI: 10.1063/5.0128507
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