Chemical Amplification Resists for Microlithography
Microlithography · Molecular Imprinting, 2005, p.37-245 [Peer Reviewed Journal]ISSN: 0065-3195 ;ISBN: 3540218629 ;ISBN: 9783540218623 ;EISSN: 1436-5030 ;EISBN: 9783540315575 ;EISBN: 3540315578 ;DOI: 10.1007/b97574
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