0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s)

Microsystems & nanoengineering, 2018-11, Vol.4 (1), p.32-11, Article 32 [Peer Reviewed Journal]

2018. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. ;The Author(s) 2018 ;ISSN: 2055-7434 ;ISSN: 2096-1030 ;EISSN: 2055-7434 ;DOI: 10.1038/s41378-018-0035-0 ;PMID: 31057920

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