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Study of the ITO sublayer influence on the tubular carbon nanostructures formation

Journal of physics. Conference series, 2019-12, Vol.1410 (1), p.12043 [Peer Reviewed Journal]

Published under licence by IOP Publishing Ltd ;2019. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. ;ISSN: 1742-6588 ;EISSN: 1742-6596 ;DOI: 10.1088/1742-6596/1410/1/012043

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  • Title:
    Study of the ITO sublayer influence on the tubular carbon nanostructures formation
  • Author: Il'in, O I ; Rudyk, N N ; Kuzhelev, M V ; Il'ina, M V ; Fedotov, A A
  • Subjects: Heating
  • Is Part Of: Journal of physics. Conference series, 2019-12, Vol.1410 (1), p.12043
  • Description: The study of the formation of catalytic centers and the growth of CNT-based TCN was carried out on the Ni (10 nm)/ITO (100 nm)/Si (370 μm) structure. Shown that the temperature at the stage of heating and growth has a significant impact on the parameters of the formed TCN. Promising for instrumental use, the TCN were formed at a temperature of 750 °C, a heating time of 20 minutes, an activation time of 3 minutes. The effect of plasma ions at the stages of «activation» and growth was also demonstrated.
  • Publisher: Bristol: IOP Publishing
  • Language: English
  • Identifier: ISSN: 1742-6588
    EISSN: 1742-6596
    DOI: 10.1088/1742-6596/1410/1/012043
  • Source: IOP Publishing Free Content
    IOPscience (Open Access)
    GFMER Free Medical Journals
    ProQuest Central
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