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Sub-ångstrom resolution using aberration corrected electron optics

Nature (London), 2002-08, Vol.418 (6898), p.617-620 [Peer Reviewed Journal]

2002 INIST-CNRS ;COPYRIGHT 2002 Nature Publishing Group ;Copyright Macmillan Journals Ltd. Aug 8, 2002 ;ISSN: 0028-0836 ;EISSN: 1476-4687 ;DOI: 10.1038/nature00972 ;PMID: 12167855 ;CODEN: NATUAS

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  • Title:
    Sub-ångstrom resolution using aberration corrected electron optics
  • Author: Batson, P. E ; Dellby, N ; Krivanek, O. L
  • Subjects: Atoms & subatomic particles ; Electron, positron and ion microscopes, electron diffractometers and related techniques ; Electrons ; Exact sciences and technology ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Microscopes ; Optics ; Physics ; Scientific imaging
  • Is Part Of: Nature (London), 2002-08, Vol.418 (6898), p.617-620
  • Description: Following the invention of electron optics during the 1930s, lens aberrations have limited the achievable spatial resolution to about 50 times the wavelength of the imaging electrons. This situation is similar to that faced by Leeuwenhoek in the seventeenth century, whose work to improve the quality of glass lenses led directly to his discovery of the ubiquitous "animalcules" in canal water, the first hints of the cellular basis of life. The electron optical aberration problem was well understood from the start, but more than 60 years elapsed before a practical correction scheme for electron microscopy was demonstrated, and even then the remaining chromatic aberrations still limited the resolution. We report here the implementation of a computer-controlled aberration correction system in a scanning transmission electron microscope, which is less sensitive to chromatic aberration. Using this approach, we achieve an electron probe smaller than 1 Å. This performance, about 20 times the electron wavelength at 120 keV energy, allows dynamic imaging of single atoms, clusters of a few atoms, and single atomic layer 'rafts' of atoms coexisting with Au islands on a carbon substrate. This technique should also allow atomic column imaging of semiconductors, for detection of single dopant atoms, using an electron beam with energy below the damage threshold for silicon.
  • Publisher: London: Nature Publishing
  • Language: English
  • Identifier: ISSN: 0028-0836
    EISSN: 1476-4687
    DOI: 10.1038/nature00972
    PMID: 12167855
    CODEN: NATUAS
  • Source: ProQuest One Psychology
    Alma/SFX Local Collection
    ProQuest Central
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