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Pattern transfer on a vertical cavity sidewall using SU8

Journal of micromechanics and microengineering, 2009-07, Vol.19 (7), p.074018-074018 (6) [Peer Reviewed Journal]

2009 INIST-CNRS ;ISSN: 0960-1317 ;EISSN: 1361-6439 ;DOI: 10.1088/0960-1317/19/7/074018

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