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Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared

Optics express, 2016-10, Vol.24 (20), p.23109-23117 [Peer Reviewed Journal]

ISSN: 1094-4087 ;EISSN: 1094-4087 ;DOI: 10.1364/oe.24.023109 ;PMID: 27828376

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  • Title:
    Optical characterization at 7.7 µm of an integrated platform based on chalcogenide waveguides for sensing applications in the mid-infrared
  • Author: Gutierrez-Arroyo, Aldo ; Baudet, Emeline ; Bodiou, Loïc ; Lemaitre, Jonathan ; Hardy, Isabelle ; Faijan, François ; Bureau, Bruno ; Nazabal, Virginie ; Charrier, Joël
  • Is Part Of: Optics express, 2016-10, Vol.24 (20), p.23109-23117
  • Description: A selenide integrated platform working in the mid-infrared was designed, fabricated and optically characterized at 7.7 µm. Ge-Sb-Se multilayered structures were deposited by RF magnetron sputtering. Using i-line photolithography and fluorine-based reactive ion etching, ridge waveguides were processed as Y-junction, spiral and S-shape waveguides. Single-mode optical propagation at 7.7 µm was observed by optical near-field imaging and optical propagation losses of 2.5dB/cm are measured. Limits of detection of 14.2 ppm and 1.6 ppm for methane and nitrous oxide, respectively, could be potentially measured by using this platform as an evanescent field sensor. Hence, these technological, experimental and theoretical results represent a first step towards the development of an integrated optical sensor operating in the mid-infrared wavelength range.
  • Publisher: United States
  • Language: English
  • Identifier: ISSN: 1094-4087
    EISSN: 1094-4087
    DOI: 10.1364/oe.24.023109
    PMID: 27828376
  • Source: GFMER Free Medical Journals
    Alma/SFX Local Collection
    ROAD: Directory of Open Access Scholarly Resources
    DOAJ Directory of Open Access Journals
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