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Fundamental Principles of Engineering Nanometrology

2010 ;ISBN: 9780080964546 ;ISBN: 0080964540 ;ISBN: 9781455777501 ;ISBN: 1455777501 ;ISBN: 9781455777532 ;ISBN: 1455777536 ;EISBN: 1437778321 ;EISBN: 9781437778328 ;EISBN: 9781455777501 ;EISBN: 1455777501 ;DOI: 10.1016/B978-1-4557-7753-2.00011-6 ;OCLC: 880827125 ;OCLC: 528581485

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  • Title:
    Fundamental Principles of Engineering Nanometrology
  • Author: Leach, Richard
  • Subjects: Metrology ; Microtechnology ; Nanodevices ; Nanostructures & Micro ; Nanotechnology
  • Description: The establishment of common standards will be an essential key to unlocking the commercial potential of Micro- and Nanotechnologies (MNT), enabling fabrication plants to interchange parts, packaging and design rules. Effectively MNT standardization will provide the micro- and nanoscale equivalents of macro-scale nuts and bolts or house bricks. Currently there is a major thrust for standardization of MNT activities, with committees of the ISO, IEC and numerous national and regional committees being set up. In this book the author makes a significant contribution to standardization in the field of MNT, extending the principles of engineering metrology to the micro- and nanoscale, with a focus on dimensional and mass metrology. The principles and techniques covered in this book form the essential toolkit for scientists and engineers involved in the commercialization of nanotechnology and measurement processes requiring accuracy at the nanoscale.
  • Publisher: San Diego: Elsevier
  • Creation Date: 2014
  • Format: 384 pages
  • Language: English
  • Identifier: ISBN: 9780080964546
    ISBN: 0080964540
    ISBN: 9781455777501
    ISBN: 1455777501
    ISBN: 9781455777532
    ISBN: 1455777536
    EISBN: 1437778321
    EISBN: 9781437778328
    EISBN: 9781455777501
    EISBN: 1455777501
    DOI: 10.1016/B978-1-4557-7753-2.00011-6
    OCLC: 880827125
    OCLC: 528581485
  • Source: ScholarVox International
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