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Plasma-immersion ion implantation for diffusive treatment

Surface & coatings technology, 1999-09, Vol.116-119, p.1-10 [Peer Reviewed Journal]

1999 Elsevier Science S.A. ;ISSN: 0257-8972 ;EISSN: 1879-3347 ;DOI: 10.1016/S0257-8972(99)00144-9

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  • Title:
    Plasma-immersion ion implantation for diffusive treatment
  • Author: Möller, Wolfhard ; Parascandola, Stefano ; Kruse, Olaf ; Günzel, Reinhard ; Richter, Edgar
  • Subjects: Diffusion ; Ion implantation ; Nitriding ; Plasma immersion
  • Is Part Of: Surface & coatings technology, 1999-09, Vol.116-119, p.1-10
  • Description: Plasma-immersion implantation is described as a technique providing high kinetic energies and, thereby, high penetration depths of atoms injected for surface modification. In connection with ion sputtering, this may create favourable boundary conditions for the efficiency of diffusive surface treatment such as nitriding. The influence of surface layers such as oxides on the nitriding process is discussed and demonstrated for stainless steel by a model experiment employing low-energy nitrogen implantation and real-time in situ surface diagnostics. It is shown that the surface oxide acts as a barrier for diffusive nitrogen transport. The evolution of the nitrogen profiles can be described reasonably well by diffusion under the influence of traps. Examples of nitrogen profiles obtained by plasma-immersion nitriding show depths of the nitrogen-rich phases of up to 50 μm and 15 μm in stainless steel at 380°C and aluminium at 500°C, respectively.
  • Publisher: Elsevier B.V
  • Language: English
  • Identifier: ISSN: 0257-8972
    EISSN: 1879-3347
    DOI: 10.1016/S0257-8972(99)00144-9
  • Source: Alma/SFX Local Collection
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