Ultra-smooth e-beam evaporated amorphous silicon thin films – A viable alternative for PECVD amorphous silicon thin films for MEMS applications
Materials Letters, 2017, Vol.197, p.52-55 [Peer Reviewed Journal]ISSN: 0167-577X ;EISSN: 1873-4979 ;DOI: 10.1016/j.matlet.2017.03.158
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