A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Nanoscale research letters, 2021-01, Vol.16 (1), p.16-16, Article 16 [Peer Reviewed Journal]

The Author(s) 2021 ;The Author(s) 2021. This work is published under http://creativecommons.org/licenses/by/4.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. ;ISSN: 1931-7573 ;ISSN: 1556-276X ;EISSN: 1556-276X ;DOI: 10.1186/s11671-021-03481-7 ;PMID: 33496852

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