Differential pressure sensor using a piezoresistive cantilever
Journal of micromechanics and microengineering, 2012-05, Vol.22 (5), p.55015-6 [Peer Reviewed Journal]2012 IOP Publishing Ltd ;2015 INIST-CNRS ;ISSN: 0960-1317 ;EISSN: 1361-6439 ;DOI: 10.1088/0960-1317/22/5/055015 ;CODEN: JMMIEZ
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