Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor
Journal of applied physics, 2018-06, Vol.123 (22) [Peer Reviewed Journal]Author(s) ;ISSN: 0021-8979 ;EISSN: 1089-7550 ;DOI: 10.1063/1.5024835 ;CODEN: JAPIAU
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