Physics and technology of magnetron sputtering discharges
Plasma sources science & technology, 2020-11, Vol.29 (11) [Peer Reviewed Journal]2020 The Author(s). Published by IOP Publishing Ltd ;ISSN: 0963-0252 ;ISSN: 1361-6595 ;EISSN: 1361-6595 ;DOI: 10.1088/1361-6595/abb7bd ;CODEN: PSTEEU
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