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ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME
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Title:
ACOUSTIC WAVE DEVICE INCLUDING A SURFACE WAVE FILTER AND A BULK WAVE FILTER, AND METHOD FOR MAKING SAME
Author:
REINHARDT, Alexandre
;
CLAVELIER, Laurent
;
DEFAY, Emmanuel
;
DEGUET, Chrystel
Subjects:
BASIC ELECTRONIC CIRCUITRY
;
ELECTRICITY
;
GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
;
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
;
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
;
RESONATORS
;
TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
;
TECHNICAL SUBJECTS COVERED BY FORMER USPC
;
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Description:
An acoustic wave device comprising at least one surface acoustic wave filter and one bulk acoustic wave filter, the device including, on a substrate comprising a second piezoelectric material: a stack of layers including a first metal layer and a layer of a first monocrystalline piezoelectric material, wherein the stack of layers is partially etched so as to define a first area in which the first and second piezoelectric materials are present and a second area in which the first piezoelectric material is absent; a second metallization at the first area for defining the bulk acoustic wave filter integrating the first piezoelectric material, and a third metallization at the second area for defining the surface acoustic wave filter integrating the second piezoelectric material.
Creation Date:
2019
Language:
English;French;German
Source:
esp@cenet
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