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PRESSURE SENSOR
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Title:
PRESSURE SENSOR
Author:
SHIMOYAMA Isao
;
NGUYEN Minh-Dung
;
MATSUMOTO Kiyoshi
;
UCHIYAMA Takeshi
;
TAKAHASHI Hidetoshi
;
SUDA Masayuki
;
SHINOHARA Yoko
;
OUMI Manabu
Subjects:
BASIC ELECTRIC ELEMENTS
;
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
;
ELECTRICITY
;
MEASURING
;
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
;
PHYSICS
;
SEMICONDUCTOR DEVICES
;
TESTING
Description:
The present invention is a pressure sensor (1) which includes a sensor main body (2) having a cavity, a cantilever (3) having a lever main body (20) and a lever support portion (21A, 21B) and which is bent according to a pressure difference between the cavity and the outside of the sensor main body (2), and a displacement detection unit (4) which detects displacement of the cantilever (3) based on resistance variation in resistance values of the main body-resistance portion (31) formed in the lever main body (20) and a lever-resistance portion (32) formed in the lever support portion (21A, 21B). A division groove (40) is formed in the lever support (21A), and the division groove (40) divides the lever-resistance portion (32) into a first resistance portion (32a) which is electrically connected to a detection electrode (35) in series and a second resistance portion (32b) which is positioned so as to be closer to the other adjacent lever support portion (21B) than the first resistance portion (32a). The first resistance portion (32a) of the lever support portion (21A, 21B) is electrically connected to the detection electrode (35) via a parallel path of a first path (S1) passing through the main body-resistance portion (31) and a second path (S2) passing through the second resistance portion (32b).
Creation Date:
2017
Language:
English;French;German
Source:
esp@cenet
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