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PRESSURE SENSOR
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Title:
PRESSURE SENSOR
Author:
SHIMOYAMA, Isao
;
MATSUMOTO, Kiyoshi
;
TAKAHASHI, Hidetoshi
;
SHINOGI, Masataka
;
NGUYEN, Minh-Dung
;
OUMI, Manabu
;
SHINOHARA, Yoko
;
UCHIYAMA, Takeshi
Subjects:
MEASURING
;
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
;
PHYSICS
;
TESTING
Description:
A pressure sensor includes a sensor body which has a first surface and a cavity with an opening in the first surface, a cantilever which has a base end portion supported on the first surface and a distal end portion provided to form a gap from a peripheral edge of the opening inside the opening, is flexurally deformed according to a pressure difference between an inside and an outside of the cavity, and is formed of a semiconductor material, and a displacement measurement unit which measures a displacement of the cantilever vibrating according to the pressure difference at a frequency larger than a lower limit frequency f LOW (Hz) defined by Expression (1), where a width (µm) of the gap is represented by G, a volume (ml) of the cavity is represented by V, and a proportional constant is represented by k. f LOW = k G 2 / V
Creation Date:
2021
Language:
English;French;German
Source:
esp@cenet
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